Estimating the extent of surface oxidation by measuring the porosity dependent dielectrics of oxygenated porous silicon

نویسندگان

  • L. K. Pan
  • Chang Q. Sun
  • C. M. Li
چکیده

Surface oxidation and porosity variation play significant roles in the dielectric performance of porous silicon (PS) yet discriminating the contribution of these events is a challenge. Here we present an analytical solution that covers contributions from the components of silicon oxide surface, silicon backbone and voids using a serial–parallel capacitance structure. Agreement between modeling predictions and measurement has been realized, which turns out an effective method that enables us to estimate the extent of surface oxidation of a specimen by measuring the porosity dependent dielectric response of the chemically passivated PS, and provides guidelines that could be useful for designing dielectric porous structures with surface oxidation. # 2004 Elsevier B.V. All rights reserved. PACS: 61.43.Gt; 77.84.Lf; 78.66.Sq; 81.05.Rm

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تاریخ انتشار 2004